澶栧欢鐢熼暱鎶€鏈
Epitaxial growth
澶栧欢鐢熼暱鏄寚鍦ㄤ竴瀹氱粨鏅跺彇鍚戠殑鍘熸湁鏅朵綋锛堜竴鑸О涓鸿‖搴曪級涓婂欢浼稿嚭骞舵寜涓€瀹氭櫠浣撳鏂瑰悜鐢熼暱鍗曟櫠灞傜殑鏂规硶锛岃繖涓崟鏅跺眰琚О涓哄寤跺眰銆傚寤剁敓闀垮彲浠ョ簿纭帶鍒跺寤跺眰鐨勭粍鍒嗐€佸帤搴︺€佺晫闈€佹幒鏉傚強鍧囧寑鎬э紝鏄崐瀵间綋婵€鍏夊櫒鍒朵綔鐨勯姝ュ伐搴忋€傚寤剁敓闀跨殑鏉愭枡缁撴瀯鍙婅川閲忕洿鎺ュ喅瀹氫簡鍗婂浣撴縺鍏夊櫒鑺墖鐨勬尝闀裤€佸姛鐜囥€佸鍛藉強鍙潬鎬э紝鏄崐瀵间綋婵€鍏夊櫒鍒朵綔鐨勬牳蹇冩妧鏈箣涓€銆
        
FAB鏅跺渾宸ヨ壓
FAB Wafer process
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鑵旈潰瑙g悊閽濆寲鎶€鏈
Cavity surface passivation treatment equipment and technology
鍦ㄨ厰闈㈣В鐞嗗強閽濆寲澶勭悊鏂归潰锛岄噰鐢ㄨ秴楂樼湡绌猴紙锛?0-10torr锛夎厰闈㈣В鐞嗛挐鍖栧伐鑹猴紝缁撳悎鏃犲惛鏀剁獥鍙g殑鑺墖鏂扮粨鏋勫強宸ヨ壓锛屾彁楂樹簡鑺墖鎶楄厰闈㈠厜瀛︾伨鍙樻崯浼ょ殑鍔熺巼銆
        
楂樹寒搴﹀悎鏉熷強鍏夌氦鑰﹀悎
High brightness combined beam And fiber coupling
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