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class="e_container-1 w1440"> <div class="cbox-1-0 p_item"><h1 class="e_h1-2 fnt_32"> 20.2 mW锛佸崟妯CSEL鍔熺巼鏁堢巼鍒锋柊璁板綍 </h1><hr class="e_line-3 s_line" /><P class="e_timeFormat-4 fnt_36">12/11</P><P class="e_timeFormat-5 fnt_24">2024</P><div class="e_richText-6 s_title clearfix"> <p><a data-linktype="2" href="https://www.researching.cn/EN/JournalMain/pr"><strong><em>Photonics </em></strong><strong><em>Research</em></strong></a><strong><em> </em></strong>2024骞寸9鏈熸枃绔狅細</p> <p> </p> <p><img id="722" src="https://omo-oss-image.thefastimg.com/portal-saas/pg2025053018403237766/cms/image/5aa6ff84-80cd-4a55-999c-7fccd339acd4.png" style="width: 100%; height: auto;" /></p> <p style="margin-bottom:16px; margin-top:0px"> </p> <p style="margin-bottom:16px; margin-top:0px"><a href="https://www.researching.cn/articles/OJc96ba3c21a1e3163">Yao Xiao, Pei Miao, Jun Wang, Heng Liu, Yudan Gou, Zhicheng Zhang, Bangguo Wang, Wuling Liu, Qijie Wang, Guoliang Deng, Shouhuan Zhou, "Twenty-milliwatt, high-power, high-efficiency, single-mode, multi-junction vertical-cavity surface-emitting lasers using surface microstructures," Photonics Res. 12, 1899 (2024)</a></p> <p style="margin-bottom:16px; margin-top:0px"> </p> <h2 style="margin-bottom: 16px; margin-top: 0px;"><strong><span style="color:#003399;">鐮旂┒鑳屾櫙</span></strong></h2> <p style="margin-bottom:16px; margin-top:0px"> </p> <p style="margin-bottom:16px; margin-top:0px">闅忕潃浜哄伐鏅鸿兘鎶€鏈殑蹇€熷彂灞曪紝楂橀€熸暟鎹腑蹇冨凡缁忔垚涓烘敮鎾戜汉宸ユ櫤鑳姐€佸ぇ鏁版嵁鍒嗘瀽銆佷簯璁＄畻鍜?G缃戠粶绛夊墠娌挎妧鏈殑鍏抽敭鍩虹璁炬柦銆傜洰鍓嶆暟鎹腑蹇冨ぇ閲忎娇鐢ㄥ妯″瀭鐩磋厰闈㈠彂灏勬縺鍏夊櫒锛圴ertical-Cavity Surface-Emitting Laser锛孷CSEL锛変綔涓虹煭璺濈楂橀€熷厜閫氫俊鐨勬牳蹇冩妧鏈紝杩欐槸鍥犱负澶氭āVCSEL鍏锋湁鎴愭湰浣庛€佽兘鑰楀皬绛変紭鐐癸紝閫傜敤浜庨珮瀵嗗害鐨勫厜浜掕繛銆傜劧鑰岋紝闅忕潃鏇撮珮鏁版嵁閫熺巼锛堣秴杩?00 Gbps锛夌殑闇€姹備笉鏂彁鍗囷紝澶氭āVCSEL鍥犳ā寮忚壊鏁ｃ€佸甫瀹介檺鍒跺拰淇″彿鍣０绛夊姡鍔块毦浠ユ弧瓒宠姹傘€傜幇鏈夌殑鏂规硶鍦ㄥ崟妯＄殑妯″紡澧炵泭浣撶Н鎵╁睍鍜岃〃闈㈠井缁撴瀯瀵规í鍚戞ā寮忕殑鎺у埗鑳藉姏鏂归潰闈复鎸戞垬锛岃繖闄愬埗浜嗗崟妯āVCSEL鍔熺巼鍜屾晥鐜囩殑绐佺牬銆傚崟妯CSEL鐨勫彂灞曞巻绋嬪琛?鎵€绀猴紝浠庤〃涓彲浠ョ湅鍑猴紝鑷?006骞翠互鏉ワ紝鍗曟āVCSEL鐨勫姛鐜囧彂灞曟瘮杈冪紦鎱紝涓€鐩寸淮鎸佸湪10 mW宸﹀彸锛屼笖鐢靛厜杞崲鏁堢巼涔熸瘮杈冧綆銆侟/p> <p style="margin-bottom:16px; margin-top:0px"> </p> <p style="margin-bottom: 16px; margin-top: 0px; text-align: center;"><span style="color:#999999;">琛? 鍗曟āVCSEL鐨勫彂灞曞巻绋婞/span></p> <p style="margin-bottom:16px; margin-top:0px"><img id="721" src="https://omo-oss-image.thefastimg.com/portal-saas/pg2025053018403237766/cms/image/e924325e-ae72-49fb-a3a8-512cc79f6c65.png" style="width: 100%; height: auto;" /></p> <p style="margin-bottom:16px; margin-top:0px">杩戝勾鏉ュ湪楂橀€熼€氫俊棰嗗煙锛岄殢鐫€PAM4+璋冨埗鏂规鐨勯噰鐢紝鍔熺巼鐨勯噸瑕佹€ф剤鍙戝嚫鏄撅紱浜哄伐鏅鸿兘鎶€鏈殑蹇€熷彂灞曞鑷存暟鎹悶鍚愰噺澶у箙澧炲姞锛屼娇寰楀櫒浠惰兘鑰楅棶棰樹篃鎴愪负鍏抽敭鍏虫敞鐐广€傚洜姝わ紝鐮旂┒鍏锋湁浣庢垚鏈€侀珮鍔熺巼銆侀珮鏁堢巼銆佷綆鍙戞暎瑙掔瓑鐗圭偣鐨勫崟妯CSEL瀵规帹鍔ㄩ珮閫熷厜閫氫俊鐨勫彂灞曞叿鏈夎嚦鍏抽噸瑕佺殑鎰忎箟銆侟/p> <p style="margin-bottom:16px; margin-top:0px"> </p> <h2 style="margin-bottom: 16px; margin-top: 0px;"><span style="color:#003399;"><strong>鐮旂┒浜偣</strong></span></h2> <p style="margin-bottom:16px; margin-top:0px"> </p> <section style="margin-top:16px; margin-bottom:16px; line-height:1.75em"><span style="font-size:16px"><span style="font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif"><span style="color:#555555"><span style="letter-spacing:normal">閽堝浠ヤ笂闂锛孅strong>鍥涘窛澶у鐢靛瓙淇℃伅瀛﹂櫌鍙夵/strong><strong>鑻忓窞闀垮厜鍗庤姱鍏夌數鎶€鏈偂浠芥湁闄愬叕鍙伏/strong><strong>鐜嬩繆鏁欐巿鐮旂┒鍥㈤槦</strong>鎻愬嚭浜嗕竴绉嶅熀浜庡缁揤CSEL鎵╁睍绾靛悜澧炵泭浠ユ彁鍗囧崟妯CSEL鍔熺巼鐨勬柟娉曪紝骞舵瀯寤轰簡澶氱粨VCSEL鐨勬ā寮忓垎鏋愭ā鍨嬶紝瑙ｅ喅浜嗗崟妯″姛鐜囬毦浠ョ獊鐮?0 mW宸﹀彸姘村钩鐨勯毦棰橈紝鍦ㄧ洿娴侀┍鍔ㄤ笅瀹炵幇浜?0.2 mW鐨勫崟鍩烘í妯℃縺鍏夎緭鍑猴紝鍔熺巼杞崲鏁堢巼杈?2%锛屽彂鏁ｈ涓?.8° (1/e</span></span></span></span><span style="font-size:14px"><span style="font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif"><span style="color:#555555"><span style="letter-spacing:normal"><sup><span style="color:#555555"><span style="letter-spacing:normal"><span style="font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif"><span style="vertical-align:super">2</span></span></span></span></sup></span></span></span></span><span style="font-size:16px"><span style="font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif"><span style="color:#555555"><span style="letter-spacing:normal">)鍜?.1° (FWHM)銆侟strong>杩欐槸杩勪粖涓烘鍗曢VCSEL鐨勬渶楂樺崟妯″姛鐜囷紝鍏跺姛鐜囧€兼帴杩戠幇鏈夊崟妯″姛鐜囪褰曠殑涓ゅ€嶃€侟/strong>杩欓」鐮旂┒灏嗕负楂樺姛鐜囥€侀珮鏁堢巼鍗曟ā鍗婂浣撴縺鍏夊櫒鐨勮繘涓€姝ュ紑鍙戝拰搴旂敤鎻愪緵鍒涙柊鏂规锛屽苟瀵?ldquo;缁胯壊”楂橀€熷厜閫氫俊鐨勫彂灞曞叿鏈夐噸瑕佺殑鎺ㄥ姩浣滅敤銆侟strong>鐩稿叧鐮旂┒鎴愭灉浠?ldquo;Twenty-milliwatt, high-power, high-efficiency, single-mode, multi-junction vertical-cavity surface-emitting lasers using surface microstructures”涓洪锛屽彂琛?/strong><strong>浜嶞/strong></span></span></span></span><a data-linktype="2" href="https://www.researching.cn/EN/JournalMain/pr" style="font-size:16px; font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif; letter-spacing:normal; color:#7b0c00"><span style="font-size:16px"><span style="font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif"><span style="letter-spacing:normal"><span style="color:#7b0c00"><strong><em><span style="background:#ffffff"><span style="letter-spacing:normal"><span style="font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif">Photonics</span></span></span></em></strong><strong><em> </em></strong><strong><em><span style="background:#ffffff"><span style="letter-spacing:normal"><span style="font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif">Research</span></span></span></em></strong></span></span></span></span></a><span style="font-size:16px"><span style="font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif"><span style="color:#555555"><span style="letter-spacing:normal"><strong> 2024骞寸9鏈熴€侟/strong></span></span></span></span></section> <section style="margin-top:16px; margin-bottom:16px; line-height:1.75em"> <p><span style="font-size:16px"><span style="font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif"><span style="color:#555555"><span style="letter-spacing:normal">棣栧厛锛岃宸ヤ綔鍦ㄤ繚鎸佷綆闃堝€肩殑宸ヤ綔鏉′欢涓嬶紝瀵规瘮浜嗕綆鍙嶅皠鐜囪緭鍑洪暅鐨勫缁揤CSEL鍜岄珮鍙嶅皠鐜囪緭鍑洪暅鍗曠粨VCSEL鐨勮〃闈㈢浉浣嶅眰鍘氬害鍙樺寲瀵瑰弽灏勭巼鐨勮皟鎺ц兘鍔涖€傚鍥?鎵€绀猴紝妯℃嫙瀹為獙缁撴灉琛ㄦ槑9瀵筽-DBR澶氱粨VCSEL璁捐鐨勫弽灏勭巼鍙樺寲楂樿揪20%锛屽叾琛ㄩ潰缁撴瀯璋冨埗鑳藉姏杩滃ぇ浜庝紶缁熷崟缁揤CSEL璁捐銆侟/span></span></span></span></p> <p> </p> <p><img id="719" src="https://omo-oss-image.thefastimg.com/portal-saas/pg2025053018403237766/cms/image/f75d00df-5e16-469d-979a-9f250fa963fc.png" style="width: 100%; height: auto;" /></p> <p style="text-align: center;"><span style="color:#999999;">鍥? (a) 6缁揤CSEL绀烘剰鍥撅紱(b) 鍗曠粨VCSEL鐨刾-DBR绀烘剰鍥撅紱(c) 澶氱粨VCSEL鐨刾-DBR绀烘剰鍥撅紱(d) 涓嶅悓DBR瀵规暟涓嬭緭鍑洪暅鍙嶅皠鐜囦笌琛ㄩ潰鐩镐綅灞係i<sub>3</sub>N<sub>4</sub>鍘氬害鐨勫叧绯狐/span></p> <p> </p> <p>鎺ョ潃锛岃宸ヤ綔鍩轰簬鍓嶆湡鏋勫缓鐨勫疄鐜颁簡瓒呴珮鏁堢巼绐佺牬鐨勫缁揤CSEL妯″瀷锛圠ight Sci Appl 13, 60, 2024)锛屽垎鏋愪簡鍩轰簬琛ㄩ潰鐩镐綅灞傚帤搴︾殑鍗曠粨涓庡缁揤CSEL鐨勯槇鍊煎鐩婂彉鍖栵紝浠ュ強鍩轰簬鍗曠粨鍗曟āVCSEL鐜版湁姘村钩鐨勫缁揤CSEL鏁堢巼鎵╁睍鐗规€с€傚鍥?鎵€绀猴紝缁撴灉琛ㄦ槑锛岄殢鐫€琛ㄩ潰Si<sub>3</sub>N<sub>4</sub>鍘氬害鐨勫彉鍖栵紝鍙嶅皠鐜囧彉鍖栧箙搴︾殑涓嶅悓浼氬鑷翠袱绫籚CSEL鐨勬渶澶ч槇鍊煎鐩婂瓨鍦ㄦ槑鏄惧樊寮傦紝鍏朵腑澶氱粨VCSEL鐨勬渶澶ч槇鍊煎鐩婄害涓哄崟缁揤CSEL鐨?鍊嶃€傚疄鐜板崟妯CSEL鐨勬牳蹇冩€濊矾鏄澶ч珮闃舵ā涓庡崟妯＄殑闃堝€煎鐩婂樊鍊硷紝浠庤€屼娇寰楀湪涓€瀹氬伐浣滄潯浠惰寖鍥村唴淇濇寔鍗曟ā宸ヤ綔锛屼絾鐩墠澶ч儴鍒嗘柟娉曞熀浜庡悇绉嶈〃闈㈠井缁撴瀯锛屼娇寰楁ā鍦哄垎甯冮泦涓湪鍙戝厜瀛斿緞澶栦晶鐨勯珮闃舵ā鍏锋湁鏇村ぇ鐨勬崯鑰椼€傚洜姝わ紝<strong>璇ュ伐浣淈/strong><strong>棣栨鎻ず浜嗗缁揤CSEL鍦ㄤ繚鎸佷綆闃堝€煎伐浣滅殑鍚屾椂鑳藉澧炲己琛ㄩ潰寰粨鏋勫楂橀樁妯″紡鐨勮皟鍒惰兘鍔涳紝</strong><strong>鎻愬嚭鐨凕/strong><strong>鏂规硶鑳藉鏄捐憲澧炲姞楂橀樁妯″紡涓庡熀妯′箣闂寸殑闃堝€煎鐩婂樊寮傦紝浠庤€屽湪鏇村ぇ鐨勮寖鍥村疄鐜伴珮闃舵ā銆侟/strong>澶氱粨VCSEL鐨勬墿灞曠壒鎬фā鎷熷疄楠岃〃鏄庨珮鍔熺巼鍗曟āVCSEL鐨勬晥鐜囨湁鏈涜秴杩?0%銆侟/p> <p> </p> <p><img id="720" src="https://omo-oss-image.thefastimg.com/portal-saas/pg2025053018403237766/cms/image/9930f025-3207-4041-82e5-79b6c6368771.png" style="width: 100%; height: auto;" /></p> <p style="text-align: center;"><span style="color:#999999;">鍥? 19瀵筽-DBR鍗曠粨鍜?瀵筽-DBR 6缁揤CSEL锛?a) 琛ㄩ潰Si<sub>3</sub>N<sub>4</sub>鍏夊鍘氬害涓庨槇鍊煎鐩婄殑鍏崇郴锛?b) 澶氱粨VCSEL鍔熺巼杞崲鏁堢巼鎵╁睍鐗规€?/span></p> <p> </p> <p>闅忓悗锛岃鍥㈤槦鍒跺浜嗕笉鍚屽昂瀵哥殑琛ㄩ潰娴洉缁撴瀯鐨?缁揤CSEL鏍峰搧骞惰繘琛屼簡鍏夌數鐗规€ц〃寰侊紝缁撴灉濡傚浘3鎵€绀恒€?缁揤CSEL鍦ㄨ繛缁數娴侀┍鍔ㄤ笅瀹炵幇浜?0.2 mW鐨勬縺鍏夎緭鍑哄姛鐜囷紝杈规ā鎶戝埗姣斿ぇ浜?5 dB锛屽搴旂殑鐢靛厜杞崲鏁堢巼涓?2%锛屽彂鏁ｈ涓?.8°銆傝繎鍦哄厜鏂戣〃鏄庡叾涓哄崟鍩烘ā婵€鍏夊伐浣滄ā寮忋€侟strong>鎹?/strong><strong>鍥㈤槦鐮旂┒浜哄憳</strong><strong>鎵€鐭ワ紝鍦ㄥ娓╄繛缁伐浣淈/strong><strong>鐨勬潯浠迭/strong><strong>涓嬶紝杩欐槸杩勪粖涓烘鍗曚釜VCSEL鐨勬渶楂樺崟妯″姛鐜囷紝涓斿姛鐜囧€煎嚑涔庢槸宸茬煡璁板綍鐨勪袱鍊嶃€侟/strong>姝ゅ锛岃鏂规硶鍙渶鍦╒CSEL鐨勮〃闈㈣繘琛岀畝鍗曠殑寰背绾ф爱鍖栫鍒昏殌锛屾棤闇€鐗规畩鍏夊埢宸ヨ壓鍜屽鏉傜殑宸ヨ壓娴佺▼锛屼繚闅滀簡鍗曟āVCSEL鐨勯珮鍙潬鎬у拰浣庢垚鏈紭鍔裤€侟/p> <p> </p> <p><img id="723" src="https://omo-oss-image.thefastimg.com/portal-saas/pg2025053018403237766/cms/image/3a025115-ca6f-4ccc-99c3-2a567612f590.png" style="width: 100%; height: auto;" /></p> <p style="text-align: center;"><span style="color:#999999;">鍥? (a) L-I-V鏇茬嚎锛?b) SR=1 μm鏃朵笉鍚岀數娴佷笅鐨勫厜璋卞浘锛?c) 20.5 mW鏃剁殑杩戝満鍥撅紱(d) 20.5 mW鏃剁殑杩滃満鍏夋枒鍥撅紱(e) 20.5 mW鏃剁殑杩滃満鍙戞暎瑙扅/span></p> <p> </p> <h2><span style="color:#003399;"><strong>鎬荤粨涓庡睍鏈汓/strong></span></h2> <h2> </h2> <section style="margin-top:16px; margin-bottom:16px; line-height:1.75em"><span style="font-size:16px"><span style="font-family:mp-quote, -apple-system-font, BlinkMacSystemFont, "Helvetica Neue", "PingFang SC", "Hiragino Sans GB", "Microsoft YaHei UI", "Microsoft YaHei", Arial, sans-serif"><span style="color:#555555"><span style="letter-spacing:normal">缁间笂锛岃鍥㈤槦鎻愬嚭浜嗕竴绉嶅彲瀹炵幇楂樺姛鐜囥€侀珮鏁堢巼銆佸己楂橀樁妯℃姂鍒惰兘鍔涖€佷綆鍙戞暎瑙掋€佷綆鎴愭湰VCSEL鐨勬柟娉曪紝鍩轰簬璇ユ柟娉曞彲鎵╁睍鍒癡CSEL鐨勫悇绫婚€氫俊娉㈡锛屼负瀹炵幇楂樻€ц兘鍗曟āVCSEL鎻愪緵浜嗘€濊矾鍜屾湁浠峰€肩殑鍙傝€冿紝涓烘湭鏉ラ珮閫熷厜閫氫俊鐨勫彂灞曞紑杈熶簡涓€鏉″叏鏂扮殑鎶€鏈矾绾匡紝鍦ㄥ疄鐜伴珮閫熷厜閫氫俊鏂瑰悜鍏锋湁鏋佸ぇ鐨勬綔鍔涖€傝繖閲屽繀椤诲己璋冪殑鏄崟妯CSEL鐨勭爺绌跺ぇ澶氳仛鐒︿簬鐩存祦椹卞姩涓嬬殑鍔熺巼鎻愬崌锛岃繖瀵逛簬瀹為檯搴旂敤鎵嶅叿鏈夐噸瑕佺殑浠峰€笺€侟/span></span></span></span></section> <section style="margin-top:16px; margin-bottom:16px; line-height:1.75em"><span style="font-size:16px"><span 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